Evolutionary algorithm based feedforward control for contouring of a biaxial piezo-actuated stage
Chih-Jer Lin, Shu-Yin ChenVolume:
19
Year:
2009
Language:
english
Pages:
11
DOI:
10.1016/j.mechatronics.2009.04.007
File:
PDF, 904 KB
english, 2009