Nanopositioning using the spiral of Archimedes: The probe-based storage case
Andreas G. Kotsopoulos, Theodore A. AntonakopoulosVolume:
20
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.mechatronics.2009.12.004
File:
PDF, 819 KB
english, 2010