Microreplication techniques using soft lithography

Microelectronic Engineering 2004 Vol. 75; Iss. 2

Microreplication techniques using soft lithography

Sungil Chung, Yonggwan Im, Jaeyoung Choi, Haedo Jeong
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Volume:
75
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2004.05.012
File:
PDF, 1.06 MB
english, 2004
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