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Microscopic properties of H2 diluted HWCVD deposited a-SiC:H film
Bibhu P. Swain, Rajiv O. DusaneVolume:
83
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2005.10.024
File:
PDF, 156 KB
english, 2006