Fabrication of three-dimensional SiC-based ceramic...

Microelectronic Engineering 2006 Vol. 83; Iss. 11-12

Fabrication of three-dimensional SiC-based ceramic micropatterns using a sequential micromolding-and-pyrolysis process

Tae Woo Lim, Sang Hu Park, Dong-Yol Yang, Tuan Anh Pham, Dong Hoon Lee, Dong-Pyo Kim, Sung-Il Chang, Jun-Bo Yoon
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Volume:
83
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2006.05.010
File:
PDF, 1.53 MB
english, 2006
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