Patterning of Ge2Sb2Te5 phase change material using UV...

Microelectronic Engineering 2007 Vol. 84; Iss. 1

Patterning of Ge2Sb2Te5 phase change material using UV nano-imprint lithography

Ki-Yeon Yang, Sung-Hoon Hong, Deok-kee Kim, Byung-ki Cheong, Heon Lee
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Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.07.004
File:
PDF, 541 KB
english, 2007
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