Density functional study of the stability and electronic...

Microelectronic Engineering 2006 Vol. 83; Iss. 11-12

Density functional study of the stability and electronic properties of TaxNy compounds used as copper diffusion barriers

P. Violet, E. Blanquet, O. Le Bacq
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Volume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.09.011
File:
PDF, 381 KB
english, 2006
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