On the applicability of self-consistent global model for...

On the applicability of self-consistent global model for the characterization of Cl2/Ar inductively coupled plasma

A.M. Efremov, Gwan-Ha Kim, Jong-Gyu Kim, A.V. Bogomolov, Chang-Il Kim
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Volume:
84
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.mee.2006.09.020
File:
PDF, 317 KB
english, 2007
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