On the applicability of self-consistent global model for the characterization of Cl2/Ar inductively coupled plasma
A.M. Efremov, Gwan-Ha Kim, Jong-Gyu Kim, A.V. Bogomolov, Chang-Il KimVolume:
84
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.mee.2006.09.020
File:
PDF, 317 KB
english, 2007