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A novel self-aligned process for platinum silicide nanowires
Zhen Zhang, Per-Erik Hellström, Jun Lu, Mikael Östling, Shi-Li ZhangVolume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.09.032
File:
PDF, 583 KB
english, 2006