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A new RuO4 solvent solution for pure ruthenium film depositions
Julien Gatineau, Kazutaka Yanagita, Christian DussarratVolume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.10.013
File:
PDF, 217 KB
english, 2006