Table top nanopatterning with extreme ultraviolet laser illumination
M.G. Capeluto, P. Wachulak, M.C. Marconi, D. Patel, C.S. Menoni, J.J. Rocca, C. Iemmi, E.H. Anderson, W. Chao, D.T. AttwoodVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.018
File:
PDF, 465 KB
english, 2007