Accurate parameter extraction for the simulation of direct structuring by ion beams
S. Beuer, M. Rommel, Ch. Lehrer, E. Platzgummer, S. Kvasnica, A.J. Bauer, H. RysselVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.033
File:
PDF, 671 KB
english, 2007