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Comparative study of e-beam resist processes at different development temperature
Haifang Yang, Aizi Jin, Qiang Luo, Changzhi Gu, Zheng CuiVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.053
File:
PDF, 206 KB
english, 2007