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Electromechanical characterization of low actuation voltage RF MEMS capacitive switches based on DC CV measurements
C. Calaza, B. Margesin, F. Giacomozzi, K. Rangra, V. MulloniVolume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.01.196
File:
PDF, 589 KB
english, 2007