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Controlling solvent diffusivity via architecture of nanopore structures in porous low-k films
Young-Kwon Park, Kwang Hee Lee, Jin-Heong Yim, Jadranka Travas-SejdicVolume:
142
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.micromeso.2010.11.020
File:
PDF, 1.02 MB
english, 2011