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Metallization of microvias by sputter-deposition
Teija Uusluoto, Paavo Jalonen, Harri Laaksonen, Aulis TuominenVolume:
44
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.microrel.2003.08.001
File:
PDF, 502 KB
english, 2004