Determining constant voltage lifetimes for silicon nitride...

Determining constant voltage lifetimes for silicon nitride capacitors in a GaAs IC process by a step stress method

Charles Whitman, Michael Meeder
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Volume:
45
Year:
2005
Language:
english
Pages:
12
DOI:
10.1016/j.microrel.2005.01.016
File:
PDF, 201 KB
english, 2005
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