Layout dependency induced deviation from Poisson area...

Microelectronics Reliability 2005 Vol. 45; Iss. 9-11

Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability

Y.-L. Li, Zs. Tökei, Ph. Roussel, G. Groeseneken, K. Maex
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Volume:
45
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2005.07.010
File:
PDF, 688 KB
english, 2005
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