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Out of plane vs in plane flexural behaviour of thin polysilicon films: Mechanical characterization and application of the Weibull approach
F. Cacchione, A. Corigliano, B. De Masi, C. RivaVolume:
45
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2005.07.090
File:
PDF, 1.17 MB
english, 2005