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Electrostatic discharge failure analysis of capacitive RF MEMS switches
J. Ruan, N. Nolhier, M. Bafleur, L. Bary, F. Coccetti, T. Lisec, R. PlanaVolume:
47
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2007.07.070
File:
PDF, 674 KB
english, 2007