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A case study of defects due to process marginalities in deep sub-micron technology
Hung-Sung Lin, Chun-Ming Chen, Kuo-Hsiung Chen, Afung Wang, CH ChaoVolume:
47
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2007.07.075
File:
PDF, 974 KB
english, 2007