Quality factor measurement of micro gyroscope structure...

Microelectronics Reliability 2008 Vol. 48; Iss. 6

Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method

Jong-Seok Kim, Sang-Woo Lee, Kyu-Dong Jung, Woon-Bae Kim, Sung-Hoon Choa, Byeong-Kwon Ju
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Volume:
48
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2008.03.001
File:
PDF, 1.19 MB
english, 2008
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