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Microsystems elements based on free-standing thick-films made with a new sacrificial layer process
Claude Lucat, Patrick Ginet, Christophe Castille, Hélène Debéda, Francis MénilVolume:
48
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2008.03.016
File:
PDF, 1.26 MB
english, 2008