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Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques
U. Zaghloul, M. Koutsoureli, H. Wang, F. Coccetti, G. Papaioannou, P. Pons, R. PlanaVolume:
50
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2010.07.027
File:
PDF, 465 KB
english, 2010