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Methodology to determine the impact of linewidth variation on chip scale copper/low-k backend dielectric breakdown
Muhammad Bashir, Linda Milor, Dae Hyun Kim, Sung Kyu LimVolume:
50
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2010.07.091
File:
PDF, 603 KB
english, 2010