Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices
R. Charavel, J. Roig, S. Mouhoubi, P. Gassot, F. Bauwens, P. Vanmeerbeek, B. Desoete, P. Moens, E. De BackerVolume:
50
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2010.07.117
File:
PDF, 917 KB
english, 2010