Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS
Yuji Sasaki, Mauro Ciappa, Takayuki Masunaga, Wolfgang FichtnerVolume:
50
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2010.07.119
File:
PDF, 672 KB
english, 2010