Back-end soft and hard defect monitoring using a single test chip
Fabrice Rigaud, Jean-Michel Portal, Hassen Aziza, Didier Nee, Julien Vast, Fabrice Argoud, Bertrand BorotVolume:
51
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2011.02.007
File:
PDF, 1.19 MB
english, 2011