![](/img/cover-not-exists.png)
Understanding the internal friction of a silicon micro-mechanical oscillator
Xiao Liu, H. Haucke, J.F. Vignola, H.J. Simpson, J.W. Baldwin, B.H. Houston, D.M. PhotiadisVolume:
521-522
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.msea.2008.10.065
File:
PDF, 535 KB
english, 2009