Ohmic contact formation of Ti/Al/Ni/Au to n-GaN by two-step...

Ohmic contact formation of Ti/Al/Ni/Au to n-GaN by two-step annealing method

Z.Z Chen, Z.X Qin, C.Y Hu, X.D Hu, T.J Yu, Y.Z Tong, X.M Ding, G.Y Zhang
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Volume:
111
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2004.03.014
File:
PDF, 157 KB
english, 2004
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