![](/img/cover-not-exists.png)
Critical doping requirements for ≤65 nm device manufacturing
Sandeep Mehta, Ukyo Jeong, Jinning Liu, Baonian GuoVolume:
114-115
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2004.07.038
File:
PDF, 348 KB
english, 2004