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Determination of Silicon self-interstitial diffusivity using isotopically pure 30Silicon multi-layer
Shingo Seto, Tomohisa Sakaguchi, Yukio Nakabayashi, Satoru Matsumoto, Junichi Murota, Kazumi Wada, Takao AbeVolume:
114-115
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2004.07.057
File:
PDF, 118 KB
english, 2004