Nitrogen-doped Czochralski silicon treated in rapid thermal process
Deren Yang, Ming Li, Can Cui, Xiangyang Ma, Duanlin QueVolume:
134
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.mseb.2006.06.056
File:
PDF, 1.03 MB
english, 2006