Gettering in silicon-on-insulator wafers with polysilicon layer
H. Savin, M. Yli-Koski, A. Haarahiltunen, V. Virkkala, H. Talvitie, M.I. Asghar, J. Sinkkonen, J. HintsalaVolume:
159-160
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2008.12.024
File:
PDF, 382 KB
english, 2009