Optimization of Si interface control layer thickness for...

Materials Science and Engineering: B 2009 Vol. 165; Iss. 1-2

Optimization of Si interface control layer thickness for high-k GaAs metal–insulator–semiconductor structures

Masamichi Akazawa, Hideki Hasegawa
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Volume:
165
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2009.03.009
File:
PDF, 502 KB
english, 2009
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