The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films
A. Ababneh, U. Schmid, J. Hernando, J.L. Sánchez-Rojas, H. SeidelVolume:
172
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.mseb.2010.05.026
File:
PDF, 489 KB
english, 2010