Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2009 Vol. 603; Iss. 1-2
Projection XEUV-nanolithography
N.I. Chkhalo, N.N. SalashchenkoVolume:
603
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.nima.2008.12.181
File:
PDF, 216 KB
english, 2009