Fabrication of nanofluidic devices utilizing proton beam...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 Vol. 260; Iss. 1

Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques

L.P. Wang, P.G. Shao, J.A. van Kan, K. Ansari, A.A. Bettiol, X.T. Pan, T. Wohland, F. Watt
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Volume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.062
File:
PDF, 842 KB
english, 2007
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