Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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RESOLNRA: A new program for optimizing the achievable depth resolution of ion beam analysis methods
M. MayerVolume:
266
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2007.11.071
File:
PDF, 551 KB
english, 2008