Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Application of mass-separated focused ion beams in nano-technology
L. BischoffVolume:
266
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2007.12.008
File:
PDF, 297 KB
english, 2008