Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Semiconductor characterization by scanning ion beam induced charge (IBIC) microscopy
E. Vittone, Z. Pastuovic, P. Olivero, C. Manfredotti, M. Jaksic, A. Lo Giudice, F. Fizzotti, E. ColomboVolume:
266
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2007.12.083
File:
PDF, 939 KB
english, 2008