Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Ultra-high depth resolution SIMS for the interface analysis of complex low-dimensional structures
Purushottam ChakrabortyVolume:
266
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2007.12.084
File:
PDF, 1.52 MB
english, 2008