Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Nuclear reaction analysis of 1H and 2H in hafnium silicate films on Si
C. Driemeier, R.P. Pezzi, I.J.R. BaumvolVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.12.089
File:
PDF, 158 KB
english, 2008