Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
![](/img/cover-not-exists.png)
Ion beam induced modifications in electron beam evaporated aluminum oxide thin films
K.R. Nagabhushana, B.N. Lakshminarasappa, C. Pandurangappa, Indra Sulania, P.K. Kulria, Fouran SinghVolume:
266
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2008.01.036
File:
PDF, 413 KB
english, 2008