Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Post deposition annealing of Hf aluminate films on Si investigated by ion backscattering and nuclear reaction analyses
L. Miotti, R.P. Pezzi, M. Copel, I.J.R. BaumvolVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2008.01.042
File:
PDF, 701 KB
english, 2008