Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Ion beam analysis of rare earth nitride thin films
J. Kennedy, S. Granville, A. Markwitz, B.J. Ruck, H.J. TrodahlVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2008.01.052
File:
PDF, 219 KB
english, 2008