Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
Depth profiling of carbon in silicon using the 12C(p, p′γ) reaction
K. Yasuda, R. Ishigami, M. Sasase, Y. ItoVolume:
266
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2008.02.010
File:
PDF, 216 KB
english, 2008