Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 24
![](/img/cover-not-exists.png)
Annealing effects in silicon implanted with helium
Bingsheng Li, Chonghong Zhang, Lihong Zhou, Yitao Yang, Honghua ZhangVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2008.09.016
File:
PDF, 337 KB
english, 2008