Controlled localised melting in silicon by high dose...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 Vol. 267; Iss. 8-9

Controlled localised melting in silicon by high dose germanium implantation and flash lamp annealing

Matthias Voelskow, Wolfgang Skorupa, Jörg Pezoldt, Thomas Kups
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
267
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.01.143
File:
PDF, 387 KB
english, 2009
Conversion to is in progress
Conversion to is failed