Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 12-13
Applications of SU-8 in the development of a Single Ion Hit Facility
N. Arteaga-Marrero, G. Astromskas, M.G. Olsson, M. Elfman, P. Kristiansson, E.J.C. Nilsson, C. Nilsson, J. PallonVolume:
267
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2009.03.009
File:
PDF, 400 KB
english, 2009